Cooline PT360 Operations Instructions

TURBOVACTurbomolecular pumps withgrease-lubricated bearingsOperating instructionsVacuum SolutionsApplication SupportServiceLEYBOLD VACUUMGA05118_1302(

GA05118_1302 - 01/2004In most applications the TURBOVAC will be flanged directto the high-vacuum flange for the system. The design ofthe lubricating

ConnectionSplinter guardA splinter guard is installed in the high-vacuum flange toprotect the TURBOVAC.Operate the pump only with this splinter guard

Connection2.3 Making the forevacuumconnectionA suitable forevacuum pump is to be connected to theforevacuum connection flange.Fig. 6 shows schematical

Observe the operating instructions for the purge gas andairing valve.2.6 Connecting the TURBOTRONIKUse the connector cable to attach the TURBOVAC andt

103102101100mbar0 25 50 75 100h-1125GA05118_1302 - 01/2004Operation143 Operation3.1 Switching onThe starting pressure for the TURBOVAC can be readfrom

GA05118_1302 - 01/2004Operation153.4 Switching offSwitch off the TURBOVAC at the TURBOTRONIK.Refer to the TURBOTRONIK operating instructions fordetail

GA05118_1302 - 01/2004Operation16Speed of the Pressure RiseAll turbomolecular pumps may be vented at full speed.However, the pressure must not increas

GA05118_1302 - 01/2004Maintenance174 MaintenanceAfter 15,000 operating hours at the latest a standardbearing exchange will be recommended for the TURB

GA05118_1302 - 01/2004Troubleshooting185 TroubleshootingWarningWhen the connector cable to the TURBO-VACis attached, the outputs of the TURBO-TRONIKfr

Cologne, September 19, 2002—————————————————————Dr. Beyer, Design Dept. ManagerGA05118_1302 - 01/200419We, the Leybold Vakuum GmbH, declare herewith t

DescriptionContentsPage1 Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2Compatibility with pumped media. . . . . . . . . . .

GA05118_1302 - 01/200420Notes

GA05118_1302 - 01/200421S A M P L EDeclaration of Contamination of Vacuum Equipment and ComponentsThe repair and/or service of vacuum equipment and co

LEYBOLD VAKUUM GmbHBonner Strasse 498 (Bayenthal)D-50968 CologneTel.: ++49 221 347-0Fax: ++49 221 347-1250http://www.leybold.come-mail:documentation@l

DescriptionTURBOVAC 50 50 D2 151 151 C 361 361 C 600 C 1000 CHigh-vacuumflangeDN 40 KF 854 00DN 40 CF 853 99DN 63 ISO-K 854 01 856 68800150V0010DN 63

GA05118_1302 - 01/2004Description4TURBOVACHigh-vacuum port nom.diam.Pumping speed for N2l/secUltimate pressure mbarForevacuum pressure, max. N2mbarRec

DescriptionTURBOVACHigh-vacuum port nom. diam.Pumping speed for N2l·s-1Ultimate pressure mbarForevacuum pressure mbarRecommended fore-vacuum pump TRIV

Description6GA05118_1302 - 01/2004TURBOVAC 50 D2TURBOVAC 151 C; TURBOVAC 361 C is similarTURBOVAC 50ABFABFACEDBFFig. 1

DescriptionA High-vacuum connector flangeB Forevacuum connector flangeC Airing flangeD Purge gas flangeE Connection for water coolingF Electrical conn

Connections2 ConnectionsCautionUnless appropriate accessories and attach-ments are used, the TURBOVAC is notsuitable for aggressive or corrosive media

2.2 Connecting the pump tothe vacuum chamberRemove the packing flange from the high-vacuumflange. Pay attention to maintaining maximum clean-liness d